Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society.
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| Nuevo Título: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures |
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| Título anterior: | Journal of vacuum science and technology |
| Formato: | Revista |
| Idioma: | English |
| Publicado: |
New York :
Published for the Society by the American Institute of Physics,
1983- .
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| Materias: | |
| Etiquetas: |
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CONICET-UNS - Bib. PLAPIQUI
Colección:
1983 B1; 1984 B2(1-2,4); 1985 B3(1); 1987 B5; 1989 B7