Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA /
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| Formato: | Libro |
| Idioma: | English |
| Publicado: |
AMF O'Hare [Chicago], IL :
Scanning Electron Microscopy, Inc.,
c1984.
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| LEADER | 01154cam a22002415a 4500 | ||
|---|---|---|---|
| 001 | EIQ.libpla004031 | ||
| 008 | 880513s1984####ilua#####b####101#0#eng#d | ||
| 005 | 20080430153319.0 | ||
| 245 | 1 | 0 | |a Electron beam interactions with solids for microscopy, microanalysis & microlithography : |b proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA / |c edited by David F. Kyser ... [et al.] ; managing editor, Daniel Halibey. |
| 260 | |a AMF O'Hare [Chicago], IL : |b Scanning Electron Microscopy, Inc., |c c1984. | ||
| 300 | |a xii, 372 p. : |b il. ; |c 29 cm. | ||
| 504 | |a Incluye referencias bibliográficas e índices. | ||
| 020 | |a 0931288304 | ||
| 111 | 2 | |a Pfefferkorn Conference |n (1st : |d 1982 : |c Monterey, Calif.) |9 111753 | |
| 700 | 1 | |a Kyser, David F., |e ed. |4 edt |9 111754 | |
| 082 | 0 | 0 | |a 530.4/1 |2 19 |
| 650 | 4 | |a Haces electrónicos |x Congresos. |9 111756 | |
| 650 | 4 | |a Electrones |x Congresos. |9 111757 | |
| 650 | 4 | |a Electron beams |x Congresses. |9 111758 | |
| 650 | 4 | |a Electrons |x Congresses. |9 111759 | |
| 010 | |a 88140898 | ||
| 040 | |a DLC |c DLC |d AR-BbSID | ||
| 859 | |a AR-BbSID |h 545.84 |i P 475 |p 3273 |b BIB. PLAPIQUI | ||